HoloDark generates quantitative deformation and strain maps over wide fields of view from a pair of dark-field electron holograms using the geometric phase analysis (GPA) technique (see GPA plug-in).
HoloDark is based on the patented technique and routines developed by Martin Hytch.
If you have a high-performance stable STEM, you can get a fully two-dimensional strain map over a similar field view and accuracy using STEM Moiré images (see sMoire plug-in), which is also based on the GPA technique.
References and Technical Notes (*Basic Readings)
- * M. Hytch, C. Gatel, F. Houdellier, E. Snoeck and K. Ishizuka, Darkfield electron holography for strain mapping at the nanoscale, Microscopy and Analysis 23, November 2012
- M.J. Hytch, F. Houdellier, F. Hue, and E. Snoeck, Dark-field electron holography for the measurement of geometric phase: Ultramicroscopy 111 (2011) 1328-1337.
- M.J. Hytch, F. Houdellier, F. Hue, and E. Snoeck, Nanoscale holographic interferometry for strain measurements in electronic devices: Nature 453 (2008) 1086-1089.
- F. Hue, M.J. Hytch, F. Houdellier, H. Bender, and A. Claverie, Strain mapping of tensiley strained silicon transistors with embedded Si1-yCy source and drain by dark-field holography: Appl. Phys. Lett. 95, 073103 (2009).
- M.J. Hytch, F. Houdellier, F. Hue, and E. Snoeck, International Patent Application No PCT/FR2008/001302
- F. Hue et al. Calibration of projector lens distortions: J. Electron Microscopy 54 (2005) 181-190.
Examples (Sample Data)
Download
You have to purchase a license (hardware key) to run this program.
Please send your price enquiry to support@hremresearch.com.
- HoloDark Phase v1.6.1
for GMS 3.6 (64bit)*
for GMS 3.5 (64bit)*
for GMS 3.4 (64bit)*
for GMS 3.3 (64bit)*
for GMS 3.2 (64bit)* (applicable from GMS 3.0)
for GMS 2.3 32bit GMS 2.3 64bit
for GMS 2.1 32bit GMS 2.1 64bit (applicable from GMS 2.0)
Required plug-ins.
User Key Driver
Previous versions
- HoloDark Phase v1.5
for GMS 1.x (32bit)
for GMS 2.1 32bit GMS 2.1 64bit
for GMS 2.3 32bit GMS 2.3 64bit
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