SmartAlign corrects for stage drift and scan distortion from fast-acquisition multi-frame images using rigid and non-rigid image alignment , and improves resolution, signal-to-noise ratio, and image-intensity distribution while reducing beam damage effects. The resultant image can be further analyzed quantitatively, say for composition and strain.

Template Matching Module for SmartAlign
Template matching is a common technique that involves searching for repeating regions, and averaging them to improve image quality. However, the “Template Matching Module” (TM module) includes non-rigid registration of the repeated image-regions. Thus, the TM module is extremely suitable for data that has been acquired by scanning techniques.



References and Technical Notes (*Basic Readings)

Examples (Sample Data)


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Required plug-ins.

User Key Driver

Previous versions


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