HoloDark for DigitalMicrograph
HoloDark generates quantitative deformation and strain maps over wide fields of view from a pair of dark-field electron holograms using the geometric phase analysis (GPA) technique (see GPA plug-in).
HoloDark is based on the patented technique and routines developed by Martin Hytch.
If you have a high-performance stable STEM, you can get a fully two-dimensional strain map over a similar field view and accuracy using STEM Moiré images (see sMoire plug-in), which is also based on the GPA technique.
Flier/Specifications
Manual
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References and Technical Notes
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* M. Hytch, C. Gatel, F. Houdellier, E. Snoeck and K. Ishizuka, Darkfield electron holography for
strain mapping at the nanoscale, Microscopy and Analysis 23, November 2012 (PDF)
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M.J. Hytch, F. Houdellier, F. Hue, and E. Snoeck, Ultramicroscopy 111 (2011) 1328-1337.
Dark-field electron holography for the measurement of geometric phase
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M.J. Hytch, F. Houdellier, F. Hue, and E. Snoeck, Nature 453 (2008) 1086-1089.
Nanoscale holographic interferometry for strain measurements in electronic devices
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F. Hue, M.J. Hytch, F. Houdellier, H. Bender, and A. Claverie, Appl. Phys. Lett. 95, 073103 (2009).
Strain mapping of tensiley strained silicon transistors with embedded Si1-yCy source and drain by dark-field holography.
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M.J. Hytch, F. Houdellier, F. Hue, and E. Snoeck,
International Patent Application No PCT/FR2008/001302
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F. Hue et al. J. Electron Microscopy 54 (2005) 181-190.
Calibration of projector lens distortions
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